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6.3 Layout and Mask Generation
瀏覽：1229
日期：2026-04-17
6.3.3 Generation of 3D-Mask Photo Resist Shape for lateral PIN-Diodes ... these
influences more thoroughly with simulation, first a proximity corrected layout has
to be generated. ..... The simulated device was a Zener-diode in a $ 350nm$ ......看更多
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