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Fundamental understanding and modeling of spin coating process : A review
瀏覽：1463
日期：2026-04-23
spin-up, stable fluid out flow, and finally evaporation dominated drying [6]. Stage 3 (flow controlled) and stage 4 (evaporation controlled) are the two stages that have the most impact on final coating thickness. Clearly stage 3 and stage 4 describe the ...看更多
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