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  Point defects and dopant diffusion in silicon - APS Link Manager
  
  1 Apr 1989 ... Diffusion in silicon of elements from columns III and V of the Periodic Table is reviewed in theory and ...
  
  2025-06-02
  
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- journals.aps.org
  
  Nonequilibrium point defects and dopant diffusion in carbon-rich ...
  
  30 Jul 2001 ... Nonequilibrium point defects and dopant diffusion in carbon-rich silicon. Phys. Rev. B 64, 073202 ...
  
  2025-05-31
  
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Diffusion Mechanisms and Intrinsic Point- Defect Properties in Silicon

日期：2025-05-30

dopant diffusion in silicon, the properties of intrinsic point defects like vacancies ( V) and self-interstitials (I), and the ......

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Dopant Diffusion Revisited

日期：2025-06-01

•Dopant interactions with Point Defects of Si substrate. - Dopant ... Dopant Diffusivity affected by Point Defect Concentration. - Point Defect ..... + is diffusivity D+ for undoped silicon because p = n....

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Point defects and dopant diffusion in silicon - APS Link Manager

日期：2025-05-30

Point defects and dopant diffusion in silicon. P. M. Fahey,. " P. B.Griffin, and J.D. Plummer. Integrated Circuits Laboratory ......

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Point defects and dopant diffusion in silicon - INSPIRE-HEP

日期：2025-05-30

(7) The role of primary point defects in the degradation of silicon detectors due to hadron and lepton irradiation - Lazanu ......

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Point defects and dopant diffusion in silicon

日期：2025-05-31

Point defects and dopant diffusion in silicon. P. M. Fahey,* P. B. Griffin, and J. D. Plummer. Integrated Circuits ......

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On the Diffusion of Point Defects in Silicon - Jstor

日期：2025-05-27

for point defect and dopant diffusion simultaneously) and because heuristic sim- plifications to the "full" model ......

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Dopant diffusion in Si and SiGe - DiVA

日期：2025-05-29

Phosphorus and Boron Diffusion in Silicon Under Equilibrium Conditions. Appl. Phys. Lett. ..... The individual dopant-point defect complexes diffuse with a diffusivity DAI or DAV, which is related to the ......

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