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日期:2025-10-14
3.1.4 Extrinsic Dopant Diffusion Up: 3.1 Diffusion in Silicon Previous: 3.1.2 Sources and Sinks 3.1.3 Intrinsic Dopant Diffusion If impurities are introduced into the silicon lattice, the gradient of the local concentration causes a diffusion process. The...
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日期:2025-10-12
3.1.1 Intrinsic Point Defects Up: 3 The Diffusion Process Previous: 3 The Diffusion Process 3.1 Diffusion in Silicon Diffusion in silicon is directly associated with native point-defects and impurity-related defects. Impurity related defects arise from th...
DIFFUSION OF ION IMPLANTED BORON IN SILICON: THE EFFECTS OF LATTICE DEFECTS AND CO-IMPLANTED IMPURIT
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日期:2025-10-07
CHAPTER 1 INTRODUCTION Motivation Since its discovery as a uniform and controllable mechanism to introduce dopant into semiconductors, ion implantation has grown to be the principal doping technology used in the manufacturing of integrated circuits (ICs)....
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日期:2025-10-12
184 Point Defects, Charge, and Diffusion Some special rules for ceramics: The number of sites is constant. This is the same as in metals, but we often have very different sites available...
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日期:2025-10-13
Enter the annealing temperature: [ C] (900 to 1350) Enter the annealing time: [min] (1 to 600) Enter the substrate depth: [µm] (0 to 10) the impurity concentration at the specified substrate depth [cm-3]...
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日期:2025-10-11
3 Fick’s first law diffusion equation • Macroscopic dopant redistribution is described by Fick’s first law (does not consider the details of the point defects reactions) , which describes how the flux (or flow) of dopant depends on the doping gradient. • ...
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日期:2025-10-11
Active Si layer - silicon layer on top of the buried oxide (BOX) in SOI substrates. learn more. Adhesion - ability of materials to stick (adhere) to each other. Adhesion promoter - material used to improve adhesion of materials, typically photoresist to t...
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日期:2025-10-09
20 Nuclear stopping is a process that creates Frenkel pair defects. A Frenkel pair describes a pair of point defects created when a Si atom is displaced into an interstitial position and the vacancy it left behind. Collisions are elastic and require a con...