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Microelectromechanical systems - Wikipedia, the free encyclopedia
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日期：2025-07-16
Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano...看更多
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