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Characterization of Organic Contaminants Outgassed form Materials Used in Semiconductor Fabs/Process
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日期：2025-06-29
3/25/03 P. Sun/C. Ayre, CA MATTEC, Intel 6 Introduction: Effects of Organic Contamination - Unintentional Doping Due to Outgassing • Unintentional doping on Si device wafers during furnace operation was observed. • Witness wafer test showed that phosphoru...看更多
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