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  Capacitively coupled plasma - Wikipedia, the free encyclopedia
  
  A capacitively coupled plasma (CCP) is one of the most common types of industrial plasma sources. It essentially consists of two metal electrodes separated by ...
  
  2025-12-04
  
  瀏覽：305
- www.me.ntut.edu.tw
  
  Chapter 7 Plasma Basics
  
  1 2006/4/12 1 Chapter 7 Plasma Basics 2006/4/12 2 Objectives •List at least three IC processes using plasma •Name three important collisions in plasma •Describe mean free path •Explain how plasma enhance etch and CVD processes •Name two high density ...
  
  2025-12-01
  
  瀏覽：1161

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Patent US5556501 - Silicon scavenger in an inductively coupled RF plasma reactor - Google Patents

日期：2025-12-06

A domed plasma reactor chamber uses an antenna driven by RF energy (LF, MF, or VHF) which is inductively coupled inside the reactor dome. The antenna generates a high density, low energy plasma inside the chamber for etching metals, dielectrics and ......

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Effect Of Bias Voltage On Properties Of DLC films Deposited By Inductively Coupled Plasma Enhanced C

日期：2025-12-03

VV. Jagannadham, C. Anandan, RG. Divya Rao, KS. Rajam, Gargi Raina / International Journal of Engineering Research and Applications (IJERA) ISSN: 2248-9622 www.ijera.com Vol. 2, Issue 4, July-August 2012, pp.2034-2042 2037 | P a g e 1200 1350 1500 ......

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TruPlasma DC Series 3000 NEW - TRUMPF Hüttinger

日期：2025-12-03

The TruPlasma DC Series 3000 NEW is a new generation of compact, water-cooled continuous DC power supplies that can replace pulsed generators in many sputtering applications: The arc management system CompensateLine allows for a dramatic reduction of ......

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Plasma Etching Outline

日期：2025-12-08

Page 1 1 Philip D. Rack University of Tennessee Plasma Etching Outline • Plasma vs. Wet Etching • The Plasma State -Plasma composition, DC & RF Plasma • Plasma Etching Principles and Processes • Equipment • Advanced Plasma Systems Philip D. Rack ......

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Plasma Etching - Centro de Componentes Semicondutores

日期：2025-12-02

2. Capacitively coupled RF plasmas 2.1 The formation of a DC voltage. A plasma is a (partially) ionized gas. In the plasmas we deal with, free electrons collide with neutral atoms/molecules and, through a dissociative process, they can remove one electron...

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Plasma-immersion ion implantation - Wikipedia, the free encyclopedia

日期：2025-12-07

Plasma-immersion ion implantation (PIII)[1] or pulsed-plasma doping (pulsed PIII) is a surface modification technique of extracting the accelerated ions from the plasma by applying a high voltage pulsed DC or pure DC power supply and targeting them into a...

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MKS Instruments - elite™ Series 750, 600, & 300 Watt, 13.56 MHz, RF Plasma Generators

日期：2025-12-04

elite RF plasma generators provide state-of-the art technology in a compact air-cooled package. Each elite RF Power Supply is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. Its .....

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Capacitively coupled plasma - Wikipedia, the free encyclopedia

日期：2025-12-02

A capacitively coupled plasma (CCP) is one of the most common types of industrial plasma sources. It essentially consists of two metal electrodes separated by a small distance, placed in a reactor. The gas pressure in the reactor can be lower than atmosph...

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