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Chapter 7 Plasma Basics
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日期：2026-04-22
1 2006/4/12 1 Chapter 7 Plasma Basics 2006/4/12 2 Objectives •List at least three IC processes using plasma •Name three important collisions in plasma •Describe mean free path •Explain how plasma enhance etch and CVD processes •Name two high density ......看更多
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