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日期:2024-04-29
8 Jun 2000 ... Standard Operating Procedure: Spin-on-Glass, Surface Level ... Spin-on-glass (
SOG) is a type of glass that can be applied as a liquid and ......
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日期:2024-04-24
Chapter 1: Introduction to Spin-On Glass Materials & Applications ______ 5 ....
from highly doped spin-on glass - SOG (or spin-on dopant - SOD) is one of the....
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日期:2024-04-24
塗式玻璃(Spin-on glass,簡稱SOG) 材料,. 因其具有低的介電常數,良好的熱穩定
性,. 低漏電流以及製程容易,逐漸成為未來所需. 的低介電常數材料製程技術。...
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日期:2024-04-26
Abstract - Spin-on-Glass (SOG), an interlayer dielectric material applied in ...
between SOG and silicon dioxide guarantee that the SOG technique will provide....
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日期:2024-04-27
Abstract: Spin-on-glass (SOG), an interlayer dielectric material applied in liquid
form to ... of SOG technology to provide an interlayer dielectric in multilevel metal
......
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日期:2024-04-26
spin-on-glass SOG wafer bonding technique that can bond compound
semiconductors and silicon without using chemical-mechanical polishing,
surface etching ......
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日期:2024-04-27
Honeywell's Accuglass® spin-on glass (SOG) mate- rials differ significantly from
other spin-on materials used in IC fabrication technology such as photoresist or ......
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日期:2024-04-29
Spin-on glass (SOG) is a mixture of SiO2 forming chemicals and dopants (often
boron or ... The SOG is applied to a clean silicon wafer by spin-coating. The SOG
......