pecvd sio2的相關文章
pecvd sio2的相關公司資訊
pecvd sio2的相關商品

Stress Control for Si3N4 and SiO2 PECVD - Oxford Plasma Technology RIE PECVD Ion Beam Sputtering
瀏覽:557
日期:2025-05-16
Oxford Plasma Technology: Stress Control for Si3N4 and SiO2 PECVD ... Strain control of films is of very high importance for the fabrication of microstructures by bulk and surface micromachining. The key parameter to control the material strain of films d...看更多